A method for deposition rate estimation on a low-cost home-built DC sputter system (2022)
Conference titles: Symposium on Microelectronics Technology and Devices - SBMicro. Unidade: EESCSubjects: FILMES FINOS, SEMICONDUTORES, ENGENHARIA MECÂNICA
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PINTO, H. M. e JASINEVICIUS, Renato Goulart e CIRINO, G. A. A method for deposition rate estimation on a low-cost home-built DC sputter system. 2022, Anais.. Piscataway, NJ, USA: IEEE, 2022. Disponível em: https://doi.org/10.1109/SBMICRO55822.2022.9881038. Acesso em: 30 abr. 2024.APA
Pinto, H. M., Jasinevicius, R. G., & Cirino, G. A. (2022). A method for deposition rate estimation on a low-cost home-built DC sputter system. In . Piscataway, NJ, USA: IEEE. doi:10.1109/SBMICRO55822.2022.9881038NLM
Pinto HM, Jasinevicius RG, Cirino GA. A method for deposition rate estimation on a low-cost home-built DC sputter system [Internet]. 2022 ;[citado 2024 abr. 30 ] Available from: https://doi.org/10.1109/SBMICRO55822.2022.9881038Vancouver
Pinto HM, Jasinevicius RG, Cirino GA. A method for deposition rate estimation on a low-cost home-built DC sputter system [Internet]. 2022 ;[citado 2024 abr. 30 ] Available from: https://doi.org/10.1109/SBMICRO55822.2022.9881038
